# US 6,720,551 B2 · Flexure assembly for a scanner

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- Number: US 6,720,551 B2
- Document ID: US6720551B2
- Status: Granted
- Kind: B2
- Application number: 10/164,460
- Filed: 2002-06-06
- Published: 2002-10-24
- Granted: 2004-04-13
- Earliest claimed: 1999-09-20
- Assignees: Veeco Instruments Inc.
- Inventors: Jason P. Cleveland; David Grigg
- Web page: https://patentgrep.com/patent/US6720551B2

## CPC

- G01Q 10/04: Fine scanning or positioning
- B82Y 35/00: Methods or apparatus for measurement or analysis of nanostructures
- G02B 26/10: Scanning systems
- Y10S 977/872: Positioner
- G01Q: SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

A flexure carriage assembly (24) has a carriage (25) formed of a substantially rigid material. The carriage has four elongate columns (32A, 32B, 32C, 32D) arranged spaced apart and parallel to one another. Each of the elongate columns has first and second ends. The flexure carriage (25) has four first cross members disposed between adjacent pairs of elongate columns and arranged to interconnect the first ends. The flexure carriage also includes four second cross members (38A-D) arranged between adjacent pairs of elongate columns and arranged to interconnect the bottom ends. The elongate columns and first and second cross members define a three-dimensional rectangular structure. The flexure carriage also has disposed centrally between the four elongate columns a translating section (29) spaced equidistant between the first and second ends of the columns. A plurality of flexures (50) are disposed between the translating element and elongate columns and between the elongate columns and first and second cross members in order to permit precise movement of the translating section (20) in a plane according to applied forces against edges of the translating section. A pair of piezoelectric assemblies (26) are connected to the translating section. One applies force to the translating section in a first linear path and the other applies force to the translating section in a second linear path perpendicular path.

## Claims

### Claim 1

An assembly comprising:
(A) elongate columns each having a top end and a bottom end;
(B) a translating section disposed between the elongate columns generally equidistant between the top and bottom ends and interconnected to the elongate columns; and
(C) a flexure interconnecting each elongate column to the translating section.

### Claim 2 (depends on 1)

The assembly of claim 1, wherein the elongate columns are essentially parallel to one another.

### Claim 3 (depends on 1)

The assembly of claim 1, further comprising a carriage that moves in the X-Y coordinate plane and reduces movement of the translating section in the Z direction.

### Claim 4 (depends on 3)

The assembly of claim 3, wherein the Z direction is perpendicular to the X-Y coordinate plane.

### Claim 5 (depends on 3)

The assembly of claim 3, wherein the carriage is substantially symmetrical.

### Claim 6 (depends on 3)

The assembly of claim 3, further comprising a rigid frame that supports the carriage.

### Claim 7 (depends on 1)

The assembly of claim 1, further comprising:
(1) upper cross members configured to connect the top ends of the elongate columns; and
(2) lower cross members configured to connect the bottom ends of the elongate columns.

### Claim 8 (depends on 1)

The assembly of claim 1, wherein the flexure further comprises:
(1) a first web formed by a first pair of opposed slots which are formed transversely and extend toward one another in each of the elongate columns;
(2) a second web formed by a second pair of opposed slots which are formed transversely in each elongate column and extend toward the first pair of opposed slots in the same elongate column; and
wherein the first web and the second web are arranged perpendicular to one another and spaced apart along the same elongate column.

### Claim 9 (depends on 1)

The assembly of claim 1, further comprising:
(1) A first piezoelectric assembly connected to the translating section, wherein the first piezoelectric assembly moves the translating section along a first linear path; and
(2) a second piezoelectric assembly connected to the translating section, wherein the second piezoelectric assembly moves the translating section along a second linear path.

### Claim 10 (depends on 9)

The assembly of claim 9, wherein each piezoelectric assembly further comprises:
(1) a central coupler having a rigid section connected to a portion of the translating section;
(2) at least one flexure connected to the rigid section; and
(3) first and second piezoelectric elements, wherein the first piezoelectric element extends from each flexure toward the top end of the elongate column and the second piezoelectric element extends from each flexure toward the bottom end of the elongate column.

### Claim 11 (depends on 10)

The assembly of claim 10, wherein each flexure interconnects each first and second piezoelectric element with the rigid section.

### Claim 12 (depends on 1)

The assembly of claim 1, further comprising a plurality of stiffening beams connected to the elongate columns.

### Claim 13 (depends on 6)

The assembly of claim 6, wherein the rigid frame is stainless steel.

### Claim 14

A carriage for micro-positioning comprising:
(A) elongate columns each having a top end and a bottom end;
(B) a translating section disposed between the elongate columns generally equidistant between the top and bottom ends and interconnected to the elongate columns;
(C) a flexure interconnecting each elongate column to the translating section;
(D) first and second piezoelectric assemblies connected to the translating section.

### Claim 15 (depends on 14)

The carriage of claim 14, wherein the first piezoelectric assembly moves the translating section along a first linear path and wherein the second piezoelectric assembly moves the translating section along the second linear path.

### Claim 16 (depends on 14)

The carriage of claim 14, wherein each piezoelectric assembly further comprises:
(1) a central coupler having a rigid section connected to a portion of the translating section;
(2) at least one flexure connected to the rigid section; and
(3) first and second piezoelectric elements, wherein the first piezoelectric element extends from each flexure toward the top end of the elongate column and the second piezoelectric element extends from each flexure toward the bottom end of the elongate column.

### Claim 17

A high resolution measurement device comprising:
(A) a measuring instrument;
(B) an assembly having a moveable carriage that support the measuring instrument for movement therewith, wherein the assembly further includes elongate columns arranged parallel to one another, each elongate column having a top end and a bottom end;
(C) a support structure securely carrying the assembly;
(D) a translating section disposed between the elongate columns generally equidistant between the top and bottom ends and interconnected to the elongate columns;
(E) a flexure interconnecting each elongate column to the translating section;
(F) a first piezoelectric assembly connected to the translating section, wherein the first piezoelectric assembly moves the translating section along a first linear path; and
(G) a second piezoelectric assembly connected to the translating section, wherein the second piezoelectric assembly moves the translating section along a second linear path.

### Claim 18 (depends on 17)

The high resolution measurement device of claim 17, wherein the movable carriage is substantially symmetrical.

### Claim 19 (depends on 17)

The high resolution measurement device of claim 17, wherein the distance between the top end of the elongate column and the translating section and the bottom end of the elongate column and the translating section is equal.