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US 6,720,507 B2Granted
Multi-seal fluid conductor electrical switch device
AssigneeAgilent Technologies, Inc.
InventorsMarvin G. Wong, You Kondoh
Life of this patent
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Abstract
A switch device and a method of manufacture are provided that includes providing two substrates. The two substrates collectively include a fluid conductor switch device structure and a trench surrounding the fluid conductor switch device structure. An inner seal material is deposed on one of the substrates and an outer seal material is deposited in the trench. The substrates are joined to one another using the inner seal material and a peripheral hermetic seal is formed between the substrates using the outer seal material.
Claims9
A switch device, comprising:
- a first substrate;
- a second substrate opposite the first substrate, the second substrate and the first substrate collectively including:
- a fluid conductor switch device structure comprising:
- plurality of channels and a peripheral trench provided in at least one of the first and second substrate, the plurality of channels encircled and isolated by portions of the trench;
- fluid conductor in the plurality of channels;
- fluid non-conductor in the plurality of channels;
- and
- a plurality of electrodes to the plurality of channels;
- inner seal material sandwiched between the first and second substrates;
- and
- outer seal material located in the trench and bonded to the first and second substrates.
8 more elements
A switch device comprising:
- a first substrate including a plurality of channels and a peripheral trench provided therein, the plurality of channels encircled and isolated by portions of the peripheral trench;
- a second substrate opposite the first substrate;
- an inner seal material on a first substrate bonded to and bonding the first and second substrates;
- an outer seal material in the peripheral trench bonding the first and second substrates;
- fluid conductor in the plurality of channels;
- fluid non-conductor in the plurality of channels;
- and
- a plurality of electrodes connected to the plurality of channels.
5 more elements
Dependencies are inferred from the claim text.