Deposition method, deposition apparatus, and pressure-reduction drying apparatus

A pressure-reduction drying apparatus comprising:

• a temperature controller on which a substrate to be processed is mounted, for providing a temperature distribution from a first peripheral point of the substrate to a second peripheral point on an opposite side of the first peripheral point thereof, and setting a temperature at the first peripheral point of the substrate higher than a temperature at the second peripheral point of the substrate;
• and
• a pressure-reducing chamber holding the substrate and the temperature controller and connected to a vacuum pump.