Polishing apparatus
AssigneeRenesas Technology Corp.
InventorsYoshio Homma, Seiichi Kondo, Noriyuki Sakuma, Youhei Yamada, Takeshi Kimura, Hiroki Nezu
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Abstract
In a polishing apparatus having a cover body with fluid pressing mechanism, during polishing, vibration and migration of sticking portion between a retainer and a membrane generated in downstream of rotation of a polishing platen is prevented by reducing sticking force between the retainer and the membrane to less than force needed to wafer polishing with rotation of the cover body.
Claims15
A polishing apparatus, comprising a cover body which is opened at a bottom thereof, has a space therein, and has an elastic membrane indirectly secured to or in a portion of an inner wall thereof through a flexor and a support plate, a surface of the inner wall in a portion at which the secured elastic membrane may contact due to flex of the membrane or the flexor being made of fluororesin, wherein the cover body covers a side and a backside surface of a workpiece placed on a polishing pad on a polishing platen, a surface of the workpiece is polished by providing relative motion between the polishing platen and the workpiece while fluid introduced into an upper space above the elastic membrane expands the elastic membrane to press the backside of the workpiece in a direction toward the polishing platen.
A polishing apparatus, comprising a rotational polishing platen and a rotational cover body arranged such that it opposes a main surface of the polishing platen through a workpiece, wherein a bottom of the cover body is opened, the cover body has space therein, an elastic membrane is secured indirectly to or in a portion of an inner wall of the cover body through a flexor and a support plate, the cover body has an introducing inlet that introduces fluid into space above the elastic membrane, and a surface of the inner wall in a portion at which the elastic membrane may contact due to flex of the membrane or the flexor comprises fluororesin.
Dependencies are inferred from the claim text.