Versatile wafer refining

A method for refining a semiconductor wafer having a semiconductor wafer surface comprising the steps of:

• providing a magnetically responsive refining element having a first operative electrode;
• providing a magnetic driving element operatively connected to a driving mechanism;
• providing a semiconductor wafer surface having an operative electrical contact forming a second operative electrode between the magnetically responsive refining element and the magnetic driving element;
• magnetically coupling the magnetically responsive refining element with the magnetic driving element;
• applying a parallel operative refining motion between the semiconductor wafer surface and the magnetically responsive refining element by moving the magnetic driving element with the driving mechanism;
• and
• applying an operative electric field across the first operative electrode and the second operative electrode for electro-refining during at least a portion of a refining cycle time.

An apparatus for refining a workpiece surface comprising:

• at least one magnetically responsive refining element free of any nonmagnetic driving mechanism;
• at least one magnetic driving element operatively connected to a driving mechanism and wherein the at least one magnetic driving element is spaced apart from the at least one magnetically responsive refining element;
• and
• a holder for a workpiece which exposes the workpiece surface for refining, the holder situated between the magnetically responsive refining element and the at least one magnetic driving element and having an adjustable retainer ring.

A magnetic refining element comprising:

• an operative electrode;
• a magnetically responsive member protected with a corrosion resistant material;
• and
• an operative electro-refining surface;
• and
• at least one material which connects the operative electrode, the magnetically responsive element, and the operative electro-refining surface.

A magnetic refining element comprising:

• at least one magnetically responsive refining member protected with a corrosion resistant material;
• at least one operative refining surface;
• and
• wherein the magnetic refining element has an identification code.