Substrate processing apparatus with independently configurable integral load locks

A substrate processing apparatus, comprising:

• a frame defining a first chamber with outer substrate transport openings for transporting substrates between the first chamber and an exterior of the frame, the frame having at least one second integral chamber formed therein, the second integral chamber in the frame communicating with the first chamber through an internal substrate transport opening in the frame for transporting substrates between the second integral chamber and the first chamber of the frame;
• at least one processing module connected to the exterior of the frame and communicating with the first chamber of the frame through at least one of the outer openings;
• a substrate transport apparatus connected to the frame for transporting substrates between the first chamber of the frame and the processing module;
• and
• a predetermined interchangeable module removably connected to the frame and located in the second integral chamber of the frame, the predetermined interchangeable module being selectable from different interchangeable modules with different configurations for corresponding to a predetermined operation of the substrate processing apparatus.