Methods and systems for reducing stick-down within MEMS structures
AssigneeHoneywell International Inc.
InventorsWilliam P. Platt, William A. Harris, Neil G. W. Hedtke
Life of this patent
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Abstract
A method for reduces the sticking of proof masses in micro-electromechanical systems (MEMS) devices to sense plates in the MEMS device due to acceleration forces to which the MEMS device is subjected. The method includes determining a beginning of acceleration events which would cause proof masses to contact sense plates, reducing sense bias voltages to the sense plates, determining an end of the acceleration event, and increasing sense bias voltages to their former levels.
Claims17
A method for reducing the sticking proof masses to sense plates in micro-electromechanical systems (MEMS) devices, said method comprising:
- determining a beginning of acceleration events which may cause proof masses to contact sense plates;
- reducing sense bias voltages to the sense plates;
- determining an end of the acceleration event;
- and
- increasing sense bias voltages to their pre-reduced levels.
A micro-electromechanical systems (MEMS) device comprising:
- a substrate;
- a plurality of sense plates attached to said substrate;
- a plurality of motor drive combs attached to said substrate;
- a plurality of motor pickoff combs attached to said substrate;
- a plurality of proof masses, each said proof mass suspended above a respective one of said sense plates and between a respective one of said motor drive combs and a respective one of said motor pickoff combs;
- and
- a control circuit configured to control a sense bias voltage applied to said sense plates based upon acceleration forces applied to said MEMS device.
A control circuit for reducing or eliminating stick-down within a micro-electromechanical systems (MEMS) device, said control circuit comprising a processor configured to control sense bias voltages applied to the sense plates based upon acceleration forces applied to the MEMS device.
A method for suppressing stick-down of proof masses to sense plates in micro-electromechanical systems (MEMS) devices, said method comprising adjusting a sense bias voltage applied to the sense plates based upon acceleration forces applied to the MEMS device.
A micro-electromechanical systems (MEMS) gyroscope comprising:
- a substrate;
- a plurality of sense plates attached to said substrate;
- a plurality of motor drive combs attached to said substrate;
- a plurality of motor pickoff combs attached to said substrate;
- a plurality of proof masses, each said proof mass suspended above a respective one of said sense plates and between a respective one of said motor drive combs and a respective one of said motor pickoff combs;
- and
- a control circuit configured to reduce stick-down between said proof masses and said sense plates, said circuit configured to adjust a sense bias voltage applied to said sense plates based upon an amount of acceleration applied to said MEMS device.
Dependencies are inferred from the claim text.