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US 6,718,823 B2Granted
Pulse width modulation drive signal for a MEMS gyroscope
AssigneeHoneywell International Inc.
InventorWilliam Platt
Life of this patent
Estimating the term…
Abstract
A MEMS gyroscope may be coupled to drive electronics that provide a pulse width modulation drive signal to the MEMS gyroscope. The pulse width modulation drive signal may be generated by comparing a pickoff signal and/or input signal to a direct current threshold level.
Claims28
A system for measuring a rate of rotation of a microelectromechanical system (MEMS) gyroscope comprising in combination:
- the MEMS gyroscope for measuring a rate of rotation, the MEMS gyroscope generating a pickoff signal;
- and
- drive electronics coupled to the MEMS gyroscope, the drive electronics computing an average voltage of the pickoff signal to create a direct current threshold level,
- wherein the drive electronics provide a pulse width modulation drive signal based on the direct current threshold level to the MEMS gyroscope.
1 more element
A method for measuring a rate of rotation of a MEMS gyroscope comprising in combination:
- creating a pulse width modulation signal for use in the MEMS gyroscope by comparing an input signal to a direct current threshold level and changing a level of the pulse width modulation signal when the input signal crosses the direct current threshold level;
- driving a proof mass at a drive velocity with the pulse width modulation drive signal;
- rotating the MEMS gyroscope;
- measuring a change in capacitance between the proof mass and a sense plate;
- calculating a Coriolis acceleration from the change in capacitance between the proof mass and the sense plate;
- and
- calculating a rate of rotation of the MEMS gyroscope from the Coriolis acceleration and the drive velocity.
4 more elements
A system for measuring a rate of rotation of a MEMS gyroscope comprising in combination:
- the MEMS gyroscope including a motor pickoff comb that is operable to provide a pickoff signal, and wherein the pickoff signal is utilized for determining a direct current threshold level;
- an input signal unit for generating an input signal;
- and
- a pulse width modulation drive signal unit for generating a pulse width modulation drive signal based on the input signal and the direct current threshold level,
- wherein the pulse width modulation drive signal is sent to the MEMS gyroscope.
2 more elements
Dependencies are inferred from the claim text.