Method of making a fluid-jet ejection device
AssigneeHewlett-Packard Development Company, L.P.
InventorsQin Liu, Naoto Kawamura, Chien-Hua Chen
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Abstract
A method of creating a fluid ejection device is described. The fluid ejection device has a substrate having a set of thin-film layers disposed on a first surface. A photoresist is applied on the set of thin-film layers, the photoresist has openings defined therein. The set of thin-film layers and substrate in the openings are etched to create deep slots beneath the first surface of the substrate. The photoresist is removed. A protection layer is applied over the set of thin-film layers thereby filling the deep slots in the set of thin-film layers and substrate. A feed channel is created on a second surface of the substrate until the protection layer within the deep slots is exposed. The protection layer is then removed.
Claims7
A method of creating a fluid ejection device from a substrate having a set of thin-film layers disposed on a first surface, the method comprising the steps of:
- applying photoresist on the set of thin-film layers, the photoresist defining openings;
- etching the set of thin-film layers and substrate in the openings to create deep slots beneath the first surface of the substrate;
- thereafter removing the photoresist from the set of thin-film layers;
- applying a protection layer over the set of thin-film layers of the substrate and filling the deep slots in the set of thin-film layers and substrate;
- creating a feed channel on a second surface of the substrate until the protection layer within the deep slots is exposed;
- and
- thereafter removing the protection layer from the thin-film layer and the deep slots.
Dependencies are inferred from the claim text.