Method of forming film pattern, device for forming film pattern, conductive film wiring, electro-optical device, electronic device, and non-contact card medium
AssigneeSeiko Epson Corporation
InventorsTakashi Hashimoto, Masahiro Furusawa
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Abstract
The present invention provides a method of forming a functional film pattern which allows the forming of fine film patterns with simplified steps. The present invention also provides a method of forming a functional film pattern where such defects as disconnection and short circuit rarely occurs, and forming a pattern which has a large thickness and is good for exhibiting a function such as electric conduction can be formed.
Claims8
A method of forming a functional film pattern by ejecting liquid containing functional components onto a substrate by inkjet comprising:
- ejecting the liquid by inkjet onto the substrate having a face where the contact angle with respect to the liquid is 30 deg. or more and 60 deg. or less;
- and
- transforming said ejected liquid into a functional film by a heat treatment;
- wherein, in said step of ejecting by inkjet, the liquid is ejected such that the distance between the centers of the inkjet liquid droplets adjacent to each other on said substrate is greater than the sum of the radius of said inkjet liquid droplets attached to said substrate and the radius of said inkjet liquid droplets before attaching to said substrate, and is smaller than double the radius of said inkjet liquid droplets attached to said substrate.
A method of forming a functional film pattern by ejecting liquid containing functional components onto a substrate by inkjet comprising:
- ejecting the liquid by inkjet onto the substrate having a face where the contact angle with respect to the liquid is 30 deg. or more and 60 deg. or less;
- transforming said ejected liquid into a functional film by a heat treatment;
- wherein said liquid droplets contain conductive particles, and
- wherein, in said step of ejection by inkjet, the liquid is ejected such that 1% or more and 10% or less of the diameter of the liquid overlap when the liquid is attached to said substrate.
A method of forming a functional film pattern by ejecting liquid containing functional components onto a substrate by inkjet comprising:
- ejecting the liquid by inkjet onto the substrate having a face where the contact angle with respect to the liquid is 30 deg. or more and 60 deg. or less;
- transforming said ejected liquid into a functional film by a heat treatment;
- ejecting the liquid again onto said functional film by inkjet after executing said ejecting step and said transforming step;
- and
- transforming the lately ejected liquid into a functional film by a heat treatment.
A method of forming a functional film pattern by ejecting liquid containing functional components onto a substrate by inkjet comprising:
- ejecting the liquid by inkjet onto the substrate having a face where the contact angle with respect to the liquid is 30 deg. or more and 60 deg. or less;
- transforming said ejected liquid into a functional film by a heat treatment;
- drying said ejected liquid after said ejecting step and before the step of transforming said ejected liquid into a functional film;
- and
- ejecting the liquid again by inkjet on said dried liquid.
Dependencies are inferred from the claim text.