Optically tunable Fabry Perot microelectromechanical resonator

Abstract

A tunable optical resonator whose resonance frequency is determined by a light signal introduced into the resonator. The resonator includes an optical cavity having a first mirror and a second mirror. The first mirror and second mirror are supported relative to one another such that the distance between the first and second mirrors may be altered by applying a force to said second mirror thereby altering the resonance frequency of said cavity. The resonator includes a light input port for receiving a tuning light signal, and a light signal generator for generating the tuning light source. The tuning light signal is introduced into the optical cavity such that the tuning light signal is reflected between the first and second mirrors. In the absence of the tuning light signal, the resonator has a resonance characterized by a resonance response curve centered at λ0. The tuning light signal has a wavelength λ1 within said resonance response curve and sufficient power to cause said resonance response curve to shift such that the resonance response curve is now centered at λ2, where λ2>λ1. In one embodiment of the invention, a circuit for monitoring the light leaving the resonator is utilized to control the wavelength and/or amplitude of the tuning light signal such that the light leaving the resonator has a predetermined wavelength.

Dependencies are inferred from the claim text.