US 6,714,338 B2 · MEM's mirror internal sensor linearization based on driver linearity

Abstract

A technique that reduces or eliminates the non-linearities associated with the internal feedback sensor used in a micro-electro-mechanical mirror assembly. Using the relatively linear response of the mirror positioning motor, associated driver electronics, and the mirror itself, a calibration is performed that compensates for the internal feedback sensor non-linearity. An expected position can then be calculated simply by multiplying the gain of the system by the output, due to the good inherent linearity in the system. The calibration will compare measured versus expected position criteria for a predefined set of constant outputs. The data will form a look-up table that will be used to correct for the sensor non-linearities.

Claims10

Dependent claims

A method of linearizing a micro-electro-mechanical (MEM) mirror position sensor, the method comprising the steps of:

providing a MEM mirror, a mirror position sensor having a non-linear response, and a mirror position control system;
tabulating mirror position sensor signals in response to a plurality of desired mirror positions;
and
adjusting a mirror position control system gain such that the tabulated mirror position sensor signals are adjusted to have a linear relationship to the plurality of desired mirror positions.

1 more element

Dependencies are inferred from the claim text.

MEM's mirror internal sensor linearization based on driver linearity

Life of this patent

MEM's mirror internal sensor linearization based on driver linearity

Life of this patent

Abstract

Claims10