Semiconductor device inspecting apparatus
AssigneeSuruga Seiki Co., Ltd.
InventorKoshi Haraguchi
Life of this patent
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Abstract
A semiconductor device inspecting apparatus includes a chamber, a stage situated in the chamber for placing a semiconductor device thereon, a femtosecond laser apparatus, and an electron microscope. The femtosecond laser apparatus includes a laser generating section for generating laser beams disposed outside the chamber, and a laser optical system for introducing the laser beams generated at the laser generating section into the chamber. The laser generating section generates femtosecond width pulse and a strength so that the semiconductor device on the stage is cut by the laser beams introduced inside the chamber. The electron microscope is disposed inside the chamber for observing the semiconductor device cut by the laser beams.
Claims5
A semiconductor device inspecting apparatus, comprising:
- a chamber,
- a stage situated in the chamber for placing a semiconductor device thereon,
- a femtosecond laser apparatus including a laser generating section for generating laser beams disposed outside the chamber, and a laser optical system for introducing the laser beams generated at the laser generating section into the chamber, said laser generating section generating femtosecond width pulse and a strength so that the semiconductor device on the stage is cut by the laser beams introduced inside the chamber, and
- an electron microscope disposed inside the chamber for observing the semiconductor device cut by the laser beams.
Dependencies are inferred from the claim text.