Motor system for positioning a load
AssigneeAsm Technology Singapore Pte Ltd
InventorsGary Peter Widdowson, You Yong Liao, Gang Ou, Ajit S. Gaunekar
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Abstract
The invention provides a motor system and a method for positioning a load. The system comprises support means such as an XY table for supporting the load. A first motor and a second motor cooperate to drive the load, whereby the first motor is adapted to provide higher thrust than the second motor and the second motor is adapted to deliver higher positioning accuracy than the first motor during a positioning sequence to position the load.
Claims22
A motor system for positioning a load, comprising support means for supporting the load;
- a first motor;
- and a second motor, the first motor and the second motor cooperating to drive the same load, whereby the first and the second motors are not each driving respective other loads rather than both driving the load, and wherein the first motor is adapted to provide higher thrust than the second motor and the second motor is adapted to deliver higher positioning accuracy than the first motor during a positioning sequence to position the load.
A method for positioning a load, comprising the use of a first motor cooperating with a second motor to drive the same load whereby the first and the second motors are not each driving respective other loads rather than both driving the load, and, wherein the first motor provides higher thrust to the load, and the second motor delivers higher positioning accuracy to the load.
Dependencies are inferred from the claim text.