Metal-insulator-metal device structure inserted into a low k material and the method for making same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCharles C. C. Lee, Chi-Hsi Wu
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCharles C. C. Lee, Chi-Hsi Wu
Estimating the term…
The present disclosure provides a metal-insulator-metal (MIM) device structure inserted in a low-k material and the method for forming same. The low-k material has a first low-k material layer at the bottom of the MIM device structure and a second low-k material layer on top thereof. The structure further comprises a first sealing layer on top of the first low-k material layer; an out gas sealing layer on top of the first sealing layer; and a device such as a capacitor formed on top of the out gas sealing layer, the capacitor having a dielectric layer, a top plate, and a bottom plate, wherein the dielectric layer has a center portion having the same width as the top plate, and two extended portions, each with a predetermined minimum thickness.
A method for forming inserting a metal-insulator-metal (MIM) structure in a low-k material, the low-k material having a first low-k material layer at the bottom of the MIM and a second low-k material layer on top of the MIM, the method comprising:
A metal-insulator-metal capacitor (MIMC) structure inserted in a low-k material, the low-k material having a first low-k material layer at the bottom of the MIMC and a second low-k material layer on top of the MIMC, the structure comprising:
A metal-insulator-metal device (MIM) structure inserted in a low-k material, the low-k material having a first low-k material layer at the bottom of the MIM device structure and a second low-k material layer on the top thereof, the structure comprising:
Dependencies are inferred from the claim text.