Acoustic absorption electromagnetic radiation sensing with SIC
AssigneeHeetronix
InventorJames D. Parsons
Life of this patent
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Abstract
Single crystal SiC at least 200 micrometers thick is employed to detect electromagnetic radiation having a wavelength less than about 10 micrometers via an acoustic absorption mechanism. Applications include IR radiation sensing, contactless temperature sensing and an IR controlled varistor.
Claims28
An electromagnetic radiation detection system, comprising:
- a body of single crystal SiC at least 200 micrometers thick,
- a source of electromagnetic radiation having a wavelength less than about 10 micrometers, and
- a detector arranged to detect a response of said SiC body to radiation from said source.
An electromagnetic radiation detection system, comprising:
- a body of single crystal SiC,
- a source of electromagnetic radiation having a wavelength less than about 10 micrometers, and
- a detector arranged to detect acoustic absorption of radiation from said source by said SiC body.
An electromagnetic radiation detection method, comprising:
- irradiating a body of SiC with radiation having a wavelength less than about 10 micrometers, and
- detecting acoustic absorption of said radiation by said body.
The method of claims, wherein said acoustic absorption is detected by detecting increases in the resistance of said SIC body in response to said radiation.
An electromagnetic radiation detection system, comprising:
- a body of single crystal SiC at least 200 microns thick thick, and
- a detector arranged to detect acoustic absorption of electromagnetic radiation having a wavelength less than about 10 micrometers by said SiC body.
An electromagnetic radiation detection method, comprising:
- irradiating a body of single crystal SiC at least 200 microns thick with electromagnetic radiation having a wavelength less than about 10 micrometers, and
- detecting a response of said SiC body to said radiation.
An electromagnetic radiation detection method, comprising:
- irradiating a body of single crystal SiC with radiation having a wavelength less than about 10 micrometers, and
- detecting acoustic absorption of said radiation by said body.
Dependencies are inferred from the claim text.