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US 6,713,400 B1Granted
Method for improving the stability of amorphous silicon
AssigneeMidwest Research Institute
InventorHoward M. Branz
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Abstract
A method of producing a metastable degradation resistant amorphous hydrogenated silicon film is provided, which comprises the steps of growing a hydrogenated amorphous silicon film, the film having an exposed surface, illuminating the surface using an essentially blue or ultraviolet light to form high densities of a light induced defect near the surface, and etching the surface to remove the defect.
Claims15
A method of producing a stabilized amorphous silicon film, comprising the steps of:
- (a) providing an amorphous silicon film deposited on to a substrate, the film having an exposed surface;
- (b) illuminating the film with an essentially blue or ultraviolet light to form a light damaged region and a region resistant to metastable degradation;
- and
- (c) etching the light damaged region to expose a portion of the region resistant to metastable degradation.
1 more element
Dependencies are inferred from the claim text.