Method for screening semiconductor devices for contact coplanarity
AssigneeTexas Instruments Incorporated
InventorLik Son Wong
Life of this patent
Estimating the term…
Abstract
A method for determining contact coplanarity of packaged semiconductor devices having a plurality of contacts. The method includes the steps of measuring the relative positions of the contacts on a subject semiconductor device; calculating from the measurements seating planes 64 formed by tilting the device to one or more of its corners and/or sides such that each said plane comprises contacts at or adjacent to the corners of the device; using the measured relative contact positions and the calculated seating planes to determine the highest deviation from contact coplanarity for the semiconductor device.
Claims9
A method for determining contact coplanarity of packaged semiconductor devices having a plurality of contacts, comprising the steps of:
- measuring the relative positions of said contacts on a subject semiconductor device;
- calculating from said measurements seating planes that would be formed if said device were tilted to one or more of its corners and/or sides such that each said plane comprises contacts at or adjacent to the corners of said device;
- using said measured relative contact positions and said calculated seating planes to determine the highest deviation from contact coplanarity for said semiconductor device.
A method for screening for contact coplanarity packaged semiconductor devices having a plurality of contacts, comprising the steps of:
- measuring the relative positions of said contacts on a subject semiconductor device;
- calculating from said measurements seating planes that would be formed if said device were tilted to one or more of its corners and/or sides such that each said plane comprises contacts at or adjacent to the corners of said device;
- using said measured relative contact positions and said calculated seating planes to determine the highest deviation from contact coplanarity for said semiconductor device;
- and
- comparing said highest deviation from contact coplanarity to a pre-determined specification.
Dependencies are inferred from the claim text.