Terpolymer for amplified resist

A terpolymer for use in a chemically amplified resist, the terpolymer having the formula:

• wherein R3 is a first aliphatic hydrocarbon;
• wherein R4 is a second aliphatic hydrocarbon;
• wherein R5 is hydrogen or methyl;
• wherein R6 comprises acid-labile group selected from a group consisting of a tertiary-alkyl group, an acetal group, a k al group, and a tertiary-alicyclic group;
• and
• wherein n/(n+m) ranges from around 0.1 to around 0.5.

A terpolymer for use in a chemically amplified resist, the terpolymer having the formula:

• wherein R3 is a first aliphatic hydrocarbon;
• wherein R4 is a second aliphatic hydrocarbon;
• wherein R5 is hydrogen methyl;
• wherein R6 comprises a acid-labile group selected from a group consisting of a tertiary-alkyl group, an acetal group, a ketal group, and a tertiary-alicyclic group, wherein the acetal group is selected from a group consisting of a tetrahydropyranyl group, a tetrahydrofuranyl group, and a 1-ethoxy ethyl group;
• wherein n comprises an integer;
• wherein m comprises an integer;
• and
• wherein n/(n+m) ranges from around 0.1 to around 0.5.

A terpolymer for use in a chemically amplified resist, the terpolymer having the formula:

• wherein R3 is a first aliphatic hydrocarbon;
• wherein R4 is a second aliphatic hydrocarbon;
• wherein R5 is hydrogen or methyl;
• wherein R6 comprises acid-labile group selected from a group consisting of a tertiary-alkyl group, an acetal group, a ketal group, and a tertiary-alicyclic group, wherein the ketal group comprises a 1-ethoxy isopropyl group;
• wherein n comprises an integer;
• wherein m comprises an integer;
• and
• wherein n/(n+m) ranges from around 0.1 to around 0.5.

A terpolymer for use in a chemically amplified resist, the terpolymer having the formula:

• wherein R3 is a first aliphatic hydrocarbon;
• wherein R4 is a second aliphatic hydrocarbon;
• wherein R5 is hydrogen or methyl;
• wherein R6 comprises a acid-labile group selected from a group consisting of a tertiary-alkyl group, an acetal group, a ketal group, and a tertiary-alicyclic group, wherein the tertiary-alicyclic group is selected from a group consisting of an isobomyl group, a 2-methyl-2-adamantyl group, a 2-ethyl-2-adamantyl group, and an 8-ethyl-8-tricyclodecyl group;
• wherein n comprises an integer;
• wherein m comprises an integer;
• and
• wherein n/(n+m) ranges from around 0.1 to around 0.5.

A terpolymer for use in a chemically amplified resist, the terpolymer having the formula:

• wherein R3 is hydrogen or a first aliphatic hydrocarbon;
• wherein R4 is hydrogen or a second aliphatic hydrocarbon;
• wherein R5 is hydrogen or methyl;
• wherein R6 comprises an acid-labile group selected from the group consisting of a tertiary-alkyl group, an acetal group, a ketal group and a tertiary-alicyclic group;
• wherein n comprises an integer;
• wherein m comprises an integer;
• wherein the result of n/(n+m) ranges from around 0.1 to around 0.5;
• and
• wherein the acetal groups selected from the group consisting of tetrahydropyranyl, tetrahydrofuranyl and a 1-ethoxy ethyl group.

A terpolymer for use in a chemically amplified resist, the terpolymer having the formula:

• wherein R3 is hydrogen or a first aliphatic hydrocarbon;
• wherein R4 is hydrogen or a second aliphatic hydrocarbon;
• wherein R5 is hydrogen or methyl;
• wherein R6 comprises an acid-labile group selected from the group consisting of a tertiary-alkyl group, an acetal group, a ketal group and a tertiary-alicyclic group;
• wherein n comprises an integer;
• wherein m comprises an integer;
• wherein the result of n/(n+m) ranges from around 0.1 to around 0.5;
• and
• wherein the ketal group comprises 1-ethoxy isopropyl.

A terpolymer for use in a chemically amplified resist, the terpolymer having the formula:

• wherein R3 is hydrogen or a first aliphatic hydrocarbon;
• wherein R4 is hydrogen or a second aliphatic hydrocarbon;
• wherein R5 is hydrogen or methyl;
• wherein R6 comprises an acid-labile group selected from the group consisting of a tertiary-alkyl group, an acetal group, a ketal group and a tertiary-alicyclic group;
• wherein n comprises an integer;
• wherein m comprises an integer;
• wherein the result of n/(n+m) ranges from around 0.1 to around 0.5;
• and
• wherein the tertiary-alicyclic group is selected from the group consisting of isobornyl, 2-methyl-2-adamantyl, 2-ethyl-2-adamantyl and 8-ethyl-8-tricyclodecyl.