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US 6,713,200 B2Granted
Pellicle and method of using the same
AssigneeAsahi Glass Company, Limited
InventorsHiroshi Arishima, Shinya Kikugawa, Hitoshi Mishiro
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Abstract
A pellicle formed by bonding a pellicle membrane composed of synthesized glass on a pellicle frame by an adhesive wherein a light shielding member for shielding ultra-violet rays irradiated to the adhesive is provided at a portion where the pellicle membrane is bonded to the pellicle frame, whereby the adhesive for bonding the pellicle membrane to the pellicle frame is prevented from being deteriorated due to the irradiation of ultra-violet rays for cleaning.
Claims18
A pellicle, comprising:
- a pellicle frame;
- and
- a pellicle membrane comprising synthesized silica glass bonded to an opening portion of the pellicle frame by an adhesive;
- and
- an ultra-violet light shielding member;
- wherein the light shielding member is provided on a front surface of the pellicle membrane.
3 more elements
A pellicle, comprising:
- a pellicle frame;
- and
- a pellicle membrane comprising synthesized silica glass bonded to an opening portion of the pellicle frame by an adhesive;
- and
- an ultra-violet light shielding member;
- wherein the light shielding member is provided between the pellicle frame and the pellicle membrane.
3 more elements
Dependencies are inferred from the claim text.