Multilayer structure used especially as a material of high relative permittivity
AssigneeMemscap
InventorLionel Girardie
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Abstract
A multilayer structure, used especially as a material of high relative permittivity, includes a plurality of separate layers, each having a thickness of less than 500 Å, and based on hafnium dioxide (HfD2), zirconium dioxide (ZrO2) and alumina (Al2O3). In practice, the hafnium dioxide, zirconium dioxide and alumina layers form alloys of formula HfxZrAlyOz. Advantageously, the stoichiometry of the HfxZrAlyOz alloys varies from one layer to another.
Claims9
A multilayer structure for use, as a material of high relative permittivity, comprising a plurality of separate layers, each having a thickness of less than 500 Å, and at least one of which is based on hafnium dioxide (HfO2), zirconium dioxide (ZrO2) and alumina (Al2O3).
Dependencies are inferred from the claim text.