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AssigneeNGK Insulators, Ltd.
InventorsHirotake Yamada, Toshio Oda, Hiromichi Kobayashi
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The present invention provides a ceramic structure for improving the resistance against a corrosive substance and to diffuse and supply a fluid over a larger area of the structure. A ceramic laminated article has a ceramic sintered body, and a ceramic film provided on the sintered body by means of chemical vapor deposition. A hollow surrounded by the sintered body and film, and holes in communication with the hollow and the outside are formed in the article. A filling material is filled in the recess of the sintered body and the holes are formed. The thus obtained assembly is heat treated to dissipate and remove the filling material through the communicating holes, so that the recess is left as the hollow.
A ceramic laminated article comprising a ceramic sintered body and a ceramic film formed on said sintered body by chemical vapor deposition, wherein said ceramic laminated article has a hollow portion formed therein defined by said sintered body and said ceramic film, and an opening in communication with said hollow portion and with an environment outside said article.
A ceramic laminate comprising a ceramic sintered body having a recess formed therein, a filling material filled in said recess and a ceramic film formed on said sintered body by chemical vapor deposition so as to cover said filling material, wherein said laminate comprises an opening formed in said laminate and communicating with said recess and with an environment outside of said laminate.
Dependencies are inferred from the claim text.