Insulating and functionalizing fine metal-containing particles with conformal ultra-thin films
AssigneeThe Regents of the University of Colorado
InventorsSteven M. George, John D. Ferguson, Alan W. Weimer, Jeffrey R. Wank
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Abstract
Particles have an ultrathin, conformal coating are made using atomic layer deposition methods. The base particles include ceramic and metallic materials. The coatings can also be ceramic or metal materials that can be deposited in a binary reaction sequence. The coated particles are useful as fillers for electronic packaging applications, for making ceramic or cermet parts, as supported catalysts, as well as other applications.
Claims83
A material in the form of non-agglomerated particles having an average diameter of less than about 500 microns, comprising substrate particles having an ultrathin film of an inorganic material deposited on the surface thereof.
A method for depositing an ultrathin inorganic material on substrate particles comprising conducting a sequence of two or more self-limiting reactions at the surface of said substrate particles to form coated particles having an ultrathin layer of an inorganic material bonded to the surface of said substrate particles.
A material in the form of particles having an average diameter of less than about 500 microns, comprising substrate particles having an ultrathin, conformal continuous or semicontinuous film of an inorganic material deposited on the surface thereof.
Dependencies are inferred from the claim text.