Process for manufacturing an electrical resistor with at least two connection contact pads on a substrate with at least one recess
AssigneeHeraeus Electro-Nite International N.V.
InventorsKarlheinz Wienand, Karlheinz Ullrich, Stefan Dietmann
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Abstract
A temperature-dependent measuring resistance with low mass and thereby rapid response time has a conductor path provided with at least two connection contact pads. The conductor path is applied to a metal substrate with an insulation layer (membrane) situated thereon. A portion of the conductor path spans a recess of the substrate in a bridge-like manner. The conductor path is selectively covered by a passivation layer up to its connection contact pads.
Claims8
A process for manufacturing a temperature-dependent measuring resistor with low mass having an electrical conductor path with at least two connection contact pads arranged on an electrically insulating surface of a metal substrate, wherein a portion of the conductor path and of the electrically insulating surface span at least one recess of the substrate in a bridge manner and the conductor path is arranged in a plane, the process comprising:
- providing a metal etching stop layer between the metal substrate and the electrically insulating surface of the metal substrate, wherein the metal etching stop layer comprises a material selected from the group consisting of Ti, Pt, Ni, and combinations thereof;
- providing the metal substrate on its reverse side with a photo-lithographic enamel structuring;
- and
- conducting a wet chemical etching from the reverse side of the substrate up to the previously applied metal etching stop layer.
Dependencies are inferred from the claim text.