Magnetically coupled linear servo-drive mechanism
AssigneeNovellus Systems, Inc.
InventorsThomas M. Pratt, Scott Douglas McClelland, Craig L. Stevens, Kerry Hopkins
Life of this patent
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Abstract
The mechanism comprises a magnetically coupled drive mechanism for transporting semiconductor wafers in a semiconductor wafer processing system. The mechanism includes an actuator within a cylinder that contains a set of magnets that drive a complementary set of magnets inside a carriage along a linear path. The carriage is limited to linear motion via a linear ball slide. The magnets in the actuator and carriage are magnetically coupled in such a way as to prevent angular rotation of the magnets within the actuator. Accordingly, driving elements in the actuator can be moved via rotation of a ball screw shaft coupled to a ball nut affixed to the actuator magnets.
Claims21
A semiconductor wafer processing system, comprising:
- a reactor for processing at least one semiconductor wafer;
- at least one load lock coupled to the reactor;
- and
- a magnetically coupled linear servo-drive mechanism located within the at least one load lock to transfer wafers to and from the reactor, the servo-drive mechanism comprising:
- a carriage for holding a wafer;
- a driven magnet array within the carriage;
- a guiding mechanism for guiding the carriage linearly;
- a cylindrical tube housing a linear actuator and isolating the actuator from a wafer environment in the load lock, a driving magnet array inside the cylindrical tube and mounted to an output of the linear actuator, the driving magnet array magnetically coupled to the driven magnet array mounted within the carriage;
- an engine coupled to the actuator to drive the actuator;
- and
- a controller coupled to the engine to control the engine for optimizing transfer times and controlling acceleration.
A magnetically coupled linear servo-drive mechanism for use in a load lock of a semiconductor fabrication system, comprising:
- a carriage having a first magnet array;
- a guiding mechanism for guiding the carriage linearly;
- a cylinder housing an actuator, the actuator magnetically coupled to the carriage using a second magnet array;
- an engine coupled to the actuator to drive the actuator;
- and
- a controller coupled to the engine to control the engine for optimizing transfer times and controlling acceleration.
A method for linearly translating a wafer in a semiconductor wafer fabrication system, comprising:
- placing a wafer on a carriage;
- magnetically coupling an actuator to the carriage to allow propulsion of the carriage and to form a rotation lock, the actuator isolated from a vacuum environment;
- and
- translating the actuator linearly.
A device for linearly translating a wafer in a semiconductor wafer fabrication system, comprising:
- means for placing a wafer on a carriage, the carriage having a first magnet array;
- means for magnetically coupling an actuator to the carriage, the actuator isolated from a vacuum environment, the actuator having a second magnet array rotationally locked with the first magnet array;
- and
- means for translating the actuator linearly.
Dependencies are inferred from the claim text.