Device for producing single crystals
AssigneesForschungszentrum Julich GmbH, Frieberger Compound Materials GmbH
InventorsKlaus Sonnenberg, Eckhard Küssel, Thomas Bünger, Tilo Flade, Berndt Weinert
Life of this patent
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Abstract
A device is made available for producing monocrystals, for example large-diameter gallium arsenide monocrystals, that has a cylindrical heating appliance with a floor heater (2) and a cover heater (3). The heating surfaces of the floor and the cover heater are considerably larger than the cross-sectional area of the monocrystal to be produced. In addition, an insulator (6) is planned for the reaction space that is designed to prevent a radial heat flow and the guarantee a strictly axial heat flow over the complete height of the reaction space between the cover heater (3) and the floor heater (2).
Claims26
A device for producing a monocrystal by growing the monocrystal from a melt of raw materials with a heating appliance for generating a temperature gradient within the melt of raw material, wherein the heating appliance comprises a rotationally symmetrical furnace with a rotation axis (M) and with an essentially level floor heater and an essentially level cover heater that can be controlled to different temperatures, the device further comprising:
- an insulating device that is structured and arranged in such a way that a heat flow in a radial direction perpendicular to the rotation axis (M) of the furnace can be controlled at a preset rate.
A device for producing a monocrystal by growing the monocrystal from a melt of raw materials with a heating appliance for generating a temperature gradient within the melt of raw material, wherein the heating appliance comprises a rotationally symmetrical furnace with a rotation axis (M) and with an essentially level floor heater and an essentially level cover heater that can be controlled to different temperatures, the device further comprising:
- an insulating device that is structured and arranged to provide an insulating effect having a gradient from the cover heater to the floor heater.
Dependencies are inferred from the claim text.