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AssigneeInternational Business Machines Corporation
InventorsShyng-Tsong Chen, Kenneth P. Rodbell, Oscar Kai Chi Hsu, Jean Vangsness, David S. Gilbride, Scott Clayton Billings, Kenneth Davis
Estimating the term…
A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, and the precursors fill these interstices substantially completely before completion of the reaction. The pad may include a thin layer of free fibers at its polishing surface. A segment of at least a portion of the free fibers are embedded in the adjacent body of the polymer and fibers. The fibers may be separate, or in the form of a woven or non-woven web.
A polishing pad comprising a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors, the fibers defining interstices, and said precursors filling said interstices substantially completely before completion of said reaction, wherein said polishing pad further comprises a polishing layer of free fibers, at least a portion of which have a segment thereof embedded in the matrix polymer of said body.
A polishing pad comprising a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors, the fibers defining interstices, and said precursors filling said interstices substantially completely before completion of said reaction, wherein said polishing pad further comprises a polishing layer of free fibers, at least a portion of which have a segment thereof embedded in the matrix polymer of said body, and wherein said reaction results from applying both pressure and heat to said polishing pad.
Dependencies are inferred from the claim text.