Process of preventing junction leakage in field emission devices
AssigneeMicron Technology, Inc.
InventorsJames J. Hofmann, John K. Lee, David A. Cathey, Glen E. Hush
Life of this patent
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Abstract
An apparatus and a method for stabilizing the threshold voltage in an active matrix field emission device. The method includes the formation of radiation-blocking elements between a cathodoluminescent display screen of the FED and semiconductor junctions formed on a baseplate of the FED.
Claims12
A process for making a field emission device having a substrate and a phosphor screen comprising:
- forming a plurality of emitters on the substrate;
- forming a dielectric layer surrounding at least one emitter of the plurality of emitters;
- forming a radiation-blocking layer over at least a portion of the dielectric layer surrounding the at least one emitter of the plurality of emitters, the radiation-blocking layer comprises two layers of X-ray-absorbing material having different gaps in an X-ray-absorbing bandwidth;
- a first of the two layers of X-ray-absorbing material comprising tungsten and a second of the two layers of X-ray-absorbing material comprises lead;
- positioning the at least one emitter of the plurality of emitters in an opposed position to the phosphor screen;
- and
- forming a vacuum between the at least one emitter of the plurality of emitters and the phosphor screen.
A process for making a field emission device comprising:
- forming at least one emitter for a substrate;
- forming a dielectric layer over a portion of the substrate located adjacent the at least one emitter;
- forming a focus ring;
- forming an X-ray-blocking layer over a portion of the dielectric layer and a portion of the focus ring, the X-ray-blocking layer for blocking radiation having a wavelength in a range of 0.06 to 12.5 nanometers;
- and
- positioning the at least one emitter opposite a screen.
A process for making a field emission device comprising:
- forming at least one emitter for a substrate;
- forming a dielectric layer over a portion of the substrate located adjacent the at least one emitter;
- forming a focus ring;
- placing the focus ring above the at least one emitter;
- forming an X-ray-blocking layer over a portion of the focus ring;
- and
- positioning the at least one emitter opposite a screen.
A process for making a field emission device comprising:
- forming at least one emitter for a substrate;
- forming a dielectric layer over a portion of the substrate located adjacent the at least one emitter;
- forming a focus ring;
- placing the focus ring above the at least one emitter;
- forming an X-ray-blocking layer over at least a portion of the focus ring, the X-ray-blocking layer blocking X-rays having a wavelength in a range of 0.06 to 12.5 nanometers;
- and
- positioning the at least one emitter opposite a screen.
A process for making a field emission device comprising:
- forming at least one emitter for a substrate;
- forming a dielectric layer over a portion of the substrate located adjacent the at least one emitter;
- forming a focus ring:
- forming a conductive X-ray-blocking layer over at least a portion of the dielectric layer and a portion of the focus ring;
- and
- positioning the at least one emitter opposite a screen.
A process for making a field emission device comprising:
- forming at least one emitter for a substrate;
- forming a dielectric layer over a portion of the substrate located adjacent the at least one emitter;
- forming a focus ring;
- forming a conductive X-ray-blocking layer over the dielectric and a portion of the focus ring, the X-ray-blocking layer for blocking radiation having a wavelength in a range of 0.06 to 12.5 nanometers;
- and
- positioning the at least one emitter opposite a screen.
A process for making a field emission device comprising:
- forming at least one emitter for a substrate;
- forming an insulating layer over a portion of the substrate located adjacent the at least one emitter;
- forming a focus ring;
- forming an X-ray-blocking layer over a portion of the insulating layer and a portion of the focus ring;
- and
- positioning the at least one emitter opposite a screen.
Dependencies are inferred from the claim text.