Method and apparatus for adjusting characteristics of electron source, and method for manufacturing electron source
AssigneeCanon Kabushiki Kaisha
InventorsShuji Aoki, Takahiro Oguchi
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Abstract
A method for adjusting characteristics of an electron source having a plurality of electron-emitting devices, and a method for manufacturing the electron source include the step of applying a pulse of a voltage for adjustment to an electron-emitting device to be adjusted one or more times according to a characteristic of the electron-emitting device, wherein the voltage for adjustment is selected from a plurality of voltages having discrete values according to the characteristic of the electron-emitting device, and a number of applying times of the pulse is determined according to the characteristic of the electron-emitting device and the selected voltage.
Claims15
A method for adjusting characteristics of an electron source having a plurality of electron-emitting devices, said method comprising the step of:
- applying a pulse of a voltage for adjustment to an electron-emitting device to be adjusted one or more times according to a characteristic of said electron-emitting device;
- wherein:
- said voltage for adjustment is selected from a plurality of voltages having discrete values according to said characteristic of said electron-emitting device;
- and
- a number of applying times of said pulse is determined according to said characteristic of said electron-emitting device and said selected voltage.
Dependencies are inferred from the claim text.