Temperature sensor device for use in a clean room

A temperature sensor device comprising:

• a covering tube having at least one opening;
• and
• a temperature sensor disposed within the covering tube and spaced radially inwardly therefrom, the temperature sensor having a free end, and the temperature sensor including a temperature sensor element that constitutes said free end thereof, a plurality of lead wires extending from the temperature sensor element, and a capsule of heat insulating material from which the temperature sensor element extends and through which the lead wires extend upon passing from the temperature sensor element, and wherein the temperature sensor element has a cylindrical side surface and a terminal end surface spanning the cylindrical side surface at one end thereof, both the side surface and the terminal end surface of said temperature sensor element being exposed to the atmosphere through said at least one opening in the covering tube.

A temperature sensor device comprising:

• a covering tube having at least one opening;
• and
• a temperature sensor disposed within the covering tube and spaced radially inwardly therefrom, the temperature sensor including a temperature sensor element exposed to the atmosphere through said at least one opening in the covering tube and comprising a sensor coil and a glass cover in which said sensor coil is enclosed, a plurality of lead wires extending from said sensor coil, and a capsule of heat insulating material from which the temperature sensor element extends and through which the lead wires extend upon passing from the temperature sensor element, said capsule encompassing a portion of the glass cover within which the lead wires extend.