System and method for interlocking management in semiconductor material supply equipment

A system for interlocking material supply equipment in semiconductor manufacture system, said system comprising:

• collecting means for collecting a user's and material information, wherein said material information is stored in a bar-code stamped on material supply equipment, and said bar-code comprises a material name, a material lot number, a material quantity, and a material identification;
• communication means for transferring said user's and said material information;
• a wireless controller communicated with said material supply equipment and said collecting means through said communication means, said wireless controller for sending out a plurality of alarm message, wherein said material identification is configured for checking said wireless controller;
• and
• alarm means coupled to said material supply equipment and communicated with said wireless controller through said communication means, said alarm means for displaying said alarm message and controlling said material supply equipment.

A method for interlock managing change materials of material supply equipment in semiconductor manufacture system, said method comprising:

• collecting changed material information of said material supply equipment;
• checking said changed material information by a wireless controller communicated with said material supply equipment, wherein said checking step comprises comparing said changed information with a database of said wireless controller;
• sending out an alarm message to said material supply equipment from said wireless controller;
• and
• disabling said corresponding material supply equipment according to said alarm message.

Apparatus for interlocking material supply equipment in semiconductor manufacture system, said apparatus comprising:

• a wireless controller used for treatment of bar-code information, wherein said bar-code information comprises a material name, a material lot number, a quantity of said material, and an identification of said equipment material for checking of said wireless controller;
• a bar-code scanner communicating with said wireless controller through a transmission system, said bar-code scanner for collecting said bar-code information of said material supply equipment;
• and
• a plurality of alarm devices coupled to a plurality of material supply equipment and said wireless controller, said alarm devices receiving a plurality of alarm message from said wireless controller.