Method of producing a piezoelectric device having at least one piezoelectric thin film layer
AssigneeSeiko Epson Corporation
InventorKouji Sumi
Life of this patent
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Abstract
A method to produce a piezoelectric device having one or more piezoelectric thin film layers and two or more electrode layers. The method comprises forming an amorphous electrode layer, forming a least one amorphous piezoelectric thin film layer over the amorphous electrode layer and forming a second electrode layer over at least one piezoelectric thin film layer. Then, the amorphous piezoelectric thin film layers and the amorphous electrode layers are crystallized by hydrothermal synthesis. The hydrothermal synthesis is not performed until all of the amorphous layers are deposited.
Claims9
A method of producing a piezoelectric device having at least one piezoelectric thin film layer and at least two electrode layers, comprising the steps of:
- forming at least one amorphous piezoelectric thin film layer, which is the amorphous state of said at least one piezoelectric thin film layer;
- forming amorphous electrode layers, which are the amorphous state of each of said electrode layers;
- and
- crystallizing by hydrothermal synthesis as a whole all of said at least one amorphous piezoelectric thin film layers and all of said amorphous electrode layers after all of said at least one amorphous piezoelectric thin film layers and all of said amorphous electrode layers are laminated.
A method of producing a piezoelectric device having at least one piezoelectric thin film layer and at least two electrode layers, comprising the steps of:
- forming at least one amorphous piezoelectric thin film layer, which is the amorphous state of said at least one piezoelectric thin film layer;
- forming amorphous electrode layers, which are the amorphous state of each of said electrode layers;
- and
- crystallizing by hydrothermal synthesis as a whole all said at least one amorphous piezoelectric thin film layer and all of said amorphous electrode layers after all of said at least one amorphous piezoelectric thin film layers and all of said amorphous electrode layers are laminated,
- wherein the step of forming said amorphous piezoelectric thin film layer is repeated at least twice and the step of forming said amorphous electrode layer is repeated at least three times to produce a structure where each of said amorphous piezoelectric thin film layers is sandwiched by two of said amorphous electrode layers.
A method of producing an ink jet recording head comprising the steps of:
- forming a diaphragm on one side of a substrate;
- forming a piezoelectric device on said diaphragm having at least one piezoelectric thin film layer and at least two electrode layers, the step of forming said piezoelectric device comprising the steps of:
- forming at least one amorphous piezoelectric thin film layer, which is the amorphous state of said at least one piezoelectric thin film layer;
- forming amorphous electrode layers, which are the amorphous state of each of said electrode layers;
- and
- crystallizing by hydrothermal synthesis as a whole all of said at least one amorphous piezoelectric thin film layer and all of said amorphous electrode layers after all of said at least one amorphous piezoelectric thin film layers and all of said amorphous electrode layers are laminated;
- and
- etching said substrate such that the diaphragm with said piezoelectric device will form one side of a pressure chamber to form said pressure chamber.
Dependencies are inferred from the claim text.