Method of manufacturing a piezoelectric resonator
AssigneeMurata Manufacturing Co., Ltd.
InventorYasuhiro Itasaka
Life of this patent
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Abstract
A piezoelectric resonator is constructed to be vibrated in a square type vibration mode and to minimize the variations in the resonant frequency caused by the manufacturing process. The resonator includes a piezoelectric substrate having a pair of main surfaces, electrodes disposed on the pair of main surfaces and grooves provided on one of the main surfaces of the piezoelectric substrate. The grooves divide at least one of the electrodes into a plurality of divided electrodes. One of the plurality of divided electrodes defines an input/output electrode. A maximum distance between the outer edges of two of the grooves disposed opposite to each other across the input/output electrode is about 0.5 to about 0.55 times the length of one side edge of the piezoelectric substrate.
Claims6
A method of manufacturing a piezoelectric resonator comprising the steps of:
- providing a piezoelectric mother substrate having a pair of main surfaces;
- forming electrodes on the pair of the main surfaces of the piezoelectric mother substrate;
- dividing at least one of the electrodes to form a plurality of divided electrodes by forming a plurality of grooves on one of the pair of main surfaces of the piezoelectric mother substrate, only one of the plurality of divided electrodes defining an input/output electrode, the remainder of the plurality of divided electrodes defining disconnected lines such that the remainder of the plurality of divided electrodes do not function as electrodes of the piezoelectric resonator;
- and
- dividing the piezoelectric mother substrate to form an individual piezoelectric resonator including an individual piezoelectric substrate such that a length of a maximum distance between the outer edges of two of the grooves disposed opposite to each other across the input/output electrode is about 0.50 to about 0.55 times a length of one side edge of the individual piezoelectric substrate is about 0.50 to about 0.55 times the length of a maximum distance between the outer edges of two of the grooves disposed opposite to each other across the input/output electrode;
- wherein
- the individual piezoelectric resonator including the individual piezoelectric substrate, said plurality of electrodes, and said plurality of grooves is configured to vibrate in a square vibration mode.
Dependencies are inferred from the claim text.