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US 6,710,908 B2Granted
Controlling micro-electro-mechanical cavities
AssigneeIridigm Display Corporation
InventorsMark W. Miles, Clarence Chui
Life of this patent
Estimating the term…
Abstract
Among other things, a cavity having a cavity dimension is configured so that the cavity dimension changes in response to electrostatic forces applied to the cavity, and at least two electrical structures are configured to apply electrostatic forces in the vicinity of the cavity, the electrical structures being independently controllable.
Claims29
Apparatus comprising
- two walls defining a cavity having a cavity dimension, the cavity being configured so that the cavity dimension changes in response to electrostatic forces applied to the cavity, wherein the cavity dimension determines an optical response to light incident on the cavity, the optical response being based on interference, and
- at least two electrical structures configured to apply electrostatic forces in the vicinity of the cavity, the electrical structures being independently controllable.
Apparatus comprising
- an array of interferometric modulators,
- actuation electrodes associated with the respective interferometric modulators, and
- a pattern of conductors connecting the actuation electrodes in groups.
A method comprising
- energizing one electrical structure to apply an electrostatic force in the vicinity of a cavity;
- and
- independently energizing another electrical structure to apply an electrostatic force in the vicinity of the cavity.
Dependencies are inferred from the claim text.