Method for fabricating a semiconductor structure including a metal oxide interface with silicon

A method of fabricating a semiconductor structure comprising:

• providing a silicon substrate having a surface;
• forming by atomic layer deposition a monocrystalline seed layer on the surface of the silicon substrate, the seed layer formed of a silicate material;
• and
• forming by atomic layer deposition one or more layers of a monocrystalline high dielectric constant oxide on the seed layer,
• wherein forming by atomic layer deposition the seed layer of a silicate material includes forming the seed layer of a silicate material selected from the group of strontium silicon oxide (SrSiO4), zirconium silicon oxide (ZrSiO4), and hafnium silicon oxide (HfSiO4),
• wherein forming by atomic layer deposition one or more layers of a monocrystalline high dielectric constant oxide on the seed layer includes forming the layer of high dielectric constant oxide selected from the group of hafnium oxide (HfO2), zirconium oxide (ZrO2), strontium titanate (SrTiO3), lanthanum oxide (La2O3), yttrium oxide (Y2O3), titanium oxide (TiO2), barium titanate (BaTiO3), lanthanum aluminate (LaAlO3), lanthanum scandium oxide (LaScO3) and aluminum oxide (Al2O3),
• wherein providing a substrate includes providing a substrate having a layer of hydrogen formed thereon by hydrogen passivation.

A method of fabricating a semiconductor structure comprising:

• providing a silicon substrate having a surface;
• forming by atomic layer deposition a monocrystalline seed layer on the surface of the silicon substrate, the seed layer formed of a silicate material;
• and
• forming by atomic layer deposition one or more layers of a monocrystalline high dielectric constant oxide on the seed layer,
• wherein forming by atomic layer deposition the seed layer of a silicate material includes forming the seed layer of a silicate material selected from the group of strontium silicon oxide (SrSiO4), zirconium silicon oxide (ZrSiO4), and hafnium silicon oxide (HfSiO4),
• wherein forming by atomic layer deposition one or more layers of a monocrystalline high dielectric constant oxide on the seed layer includes forming the layer of high dielectric constant oxide selected from the group of hafnium oxide (HfO2), zirconium oxide (ZrO2), strontium titanate (SrTiO3), lanthanum oxide (La2O3), yttrium oxide (Y2O3), titanium oxide (TiO2), barium titanate (BaTiO3), lanthanum aluminate (LaAlO3), lanthanum scandium oxide (LaScO3) and aluminum oxide (Al2O3),
• whereby the forming by atomic layer deposition one or more layers of a monocrystalline high dielectric constant oxide includes exposing the monocrystalline seed layer to a metal precursor, thereby forming a layer of metal, flushing the layer of metal with an inert gas, exposing the layer of metal to at least one of oxygen (O) with or without plasma, water (H2O), nitrous oxide (N2O), or nitric oxide (NO) to oxidize the layer of metal thereby forming a single monocrystalline high-k oxidized monolayer, and flushing the oxidized monolayer with an inert gas.