Nanostructured ceramic platform for micromachined devices and device arrays

A sensor comprising:

• a nanostructured anodic alumina substrate having two sides, wherein said anodic alumina substrate comprises substantially parallel nanoscale pores;
• wherein each side of the alumina substrate has at least one deposited layer substantially perpendicular to the nanoscale pores;
• and
• wherein at least one of said deposited layers comprises an electrode.

A method of making a device comprising the steps of:

• forming an anodic alumina film on an aluminum substrate, wherein said anodic alumina substrate comprises substantially parallel nanoscale pores;
• micromachining the anodic alumina him to obtain two surfaces by a technique selected from the group consisting of anisotropic etching and localized anodization;
• and
• depositing at least one layer on each of the surfaces of the anodic alumina film;
• wherein at least one layer of the deposited layers is an electrode.

A device comprising:

• a nanostructured anodic alumina substrate having two sides;
• wherein said anodic alumina substrate comprises substantially parallel pores connecting the two sides;
• a substance deposited in the nancscale pores of the anodic alumina substrate;
• wherein each side of the alumina substrate has at least one deposited layer;
• and
• wherein at least one of said deposited layers comprises an electrode.

A device comprising:

• a nanostructured anodic alumina substrate having two sides,
• wherein said anodic alumina substrate comprises substantially parallel nanoscale pores connecting the two sides;
• wherein each side of the alumina substrate has at least one deposited layer substantially perpendicular to the nanoscale pores;
• and
• wherein at least one of said deposited layers comprises an electrode;
• and
• wherein at least one of the deposited layers and/or the anodic alumina substrate is patterned using a mask.

A product comprising:

• a nanostructured anodic alumina substrate having two sides;
• wherein said anodic alumina substrate comprises substantially parallel pores connecting the two sides;
• a substance deposited in the pores of the anodic alumina substrate;
• wherein each side of the alumina substrate has at least one deposited layer substantially perpendicular to the nanoscale pores;
• and
• wherein at least one of the deposited layers and/or anodic alumina substrate is patterned using a mask.