Capacity type pressure sensor and method of manufacturing the pressure sensor

Abstract

A capacitive pressure sensor includes a first substrate (1), a first flat electrode (1a) formed on the first substrate (1), a pressure-sensing frame (4) surrounding the first flat electrode (1a) provided on the first substrate (1), second substrates (2, 3) connected to the pressure-sensing frame (4) opposedly to the first substrate (1) and forming a capacitance chamber (7) together with the first substrate (1) and the pressure-sensing frame (4), a stage (5) provided on the second substrates (2, 3) in the capacitance chamber (7), separated from the pressure-sensing frame (4), and opposed to and separated from the first flat electrode (1a), and a second flat electrode (2a) provided on the stage (5) and opposed to the first flat electrode (1a), wherein the pressure-sensing frame (4) deforms elastically according to a pressure applied to the first and second substrates (1, 2, 3).

Dependencies are inferred from the claim text.