Method of separating thin-film device, method of transferring thin-film device, thin-film device, active matrix substrate, and liquid crystal display device

A device for transferring thin film device to a transfer material, comprising:

• a substrate;
• a separation layer formed on the substrate, ions being implanted in the separation layer, the ions including at least hydrogen ions, nitrogen ions, silicon ions or a combination thereof;
• and
• a thin film device, the separation layer positioned between the thin film device and the substrate;
• an intermediate layer disposed between the thin film device and the separation layer, the intermediate layer having an opening;
• and
• an electrode connected with the thin film device, and formed at the opening such that the electrode is exposed when it is transferred.

A device for transferring thin film transistor to a transfer material, comprising:

• a substrate;
• a separation layer formed on the substrate, ions being implanted in the separation layer;
• a thin film transistor, the separation layer positioned between the thin film transistor and the substrate;
• and
• an intermediate layer disposed between the thin film transistor and the separation layer;
• a thin film transitor, the separation layer positioned betweem the thin film transistor and the substrate;
• an intermediate layer disposed between the thin film transistor and the separation layer, the intermediate layer having an opening;
• and
• an electrode connected with the thin film transistor, and formed at the opening such that the electrode is exposed when it is transferred.

A device for transferring thin film transistor to a transfer material, comprising:

• a substrate;
• a separation layer formed on the substrate, hydrogen ions being implanted in the separation layer;
• and
• a thin film transistor, the separation layer positioned between the thin film transistor and the substrate;
• an intermediate layer disposed between the thin film transistor and the separation layer, the intermediate layer having an opening;
• and
• an electrode connected with the thin film transistor, and formed at the opening such that the electrode is exposed when it is transferred.