Microdischarge devices and arrays
AssigneeThe Board of Trustees of the University of Illinois
InventorsJ. Gary Eden, Sung-Jin Park, Clark J. Wagner
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Abstract
A discharge device is described that contains an anode, a cathode, and an insulating layer disposed between the anode and the cathode. A cavity is extends entirely through at least one of the anode or cathode and penetrates the dielectric layer. At least one of the anode or cathode may include a screen or the dielectric layer may have a plurality of films with at least two different dielectric constants. The voltage differences between the anode and cathode in each of multiple devices electrically connected together may be limited.
Claims56
A discharge device in which a discharge is formed, comprising:
- a first electrode;
- a second electrode on the first electrode;
- a dielectric layer between the first and second electrodes;
- and
- a cavity in the dielectric layer and extending into the second electrode,
- wherein the first electrode comprises a screen and electron multiplication in the discharge occurs primarily outside the screen.
A discharge device, comprising:
- a first electrode;
- a second electrode on the first electrode;
- a dielectric layer between the first and second electrodes;
- and
- a cavity that extends through the dielectric layer,
- wherein the dielectric layer comprises a plurality of films, at least one of the films having a dielectric constant different from at least another of the films.
Dependencies are inferred from the claim text.