Control of robotic systems
AssigneeFSI International, Inc.
InventorNatarajan Ramanan
Life of this patent
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Abstract
In an automated processing system, a system controller uses a meta-heuristic technique for identifying an optimal or near-optimal control schedule for controlling movements and operations of a robot. In particular embodiments, the system controller uses a genetic algorithm to breed a control schedule for the robot. In particular embodiments, the system controller dynamically updates the control schedule based on system operation.
Claims18
A method for calculating a control schedule for a robot within a fabrication system, the method comprising:
- determining operating characteristics for steps in a fabrication process, the operating characteristics comprising:
- a robot movement matrix for movements between a plurality of processing stations, wherein the robot movement matrix indicates movement time for a robot between the processing stations based on whether or not the robot is currently loaded with a wafer;
- processing times for each of the processing stations;
- and
- for each of the processing stations, a time for the robot to load a wafer at the processing station and a time for the robot to unload a wafer at the processing station;
- identifying a plurality of control schedules each detailing a process for the robot to shuttle wafers between the processing stations;
- determining fitness for each of the control schedules using the operating characteristics;
- applying a genetic algorithm to select a chosen control schedule based on fitness for each of the control schedules;
- and
- operating the robot according to the chosen control schedule.
A wafer fabrication system comprising:
- a plurality of processing stations;
- a system controller operable to determine operating characteristics for steps in a fabrication process, the operating characteristics comprising:
- a robot movement matrix for movements of a robot between the processing stations, wherein the robot movement matrix indicates movement time for the robot between the processing stations based on whether or not the robot is currently loaded with a wafer;
- processing times for each of the processing stations;
- and
- for each of the processing stations, a time for the robot to load a wafer at the processing station and a time for the robot to unload a wafer at the processing station;
- the system controller further operable to identify a plurality of control schedules each detailing a process for the robot to shuttle wafers between the processing stations, and to apply a genetic algorithm to select a chosen control schedule based on fitness for each of the control schedules;
- and
- the robot operable to service the processing stations according to the chosen control schedule.
Logic for calculating a control schedule for a robot within a fabrication system, the logic encoded in media and operable when executed to perform the steps of:
- determining operating characteristics for steps in a fabrication process, the operating characteristics comprising:
- a robot movement matrix for movements between a plurality of processing stations, wherein the robot movement matrix indicates movement time for a robot between the processing stations based on whether or not the robot is currently loaded with a wafer;
- processing times for each of the processing stations;
- and
- for each of the processing stations, a time for the robot to load a wafer at the processing station and a time for the robot to unload a wafer at the processing station;
- identifying a plurality of control schedules each detailing a process for the robot to shuttle wafers between the processing stations;
- determining fitness for each of the control schedules using the operating characteristics;
- applying a genetic algorithm to select a chosen control schedule based on fitness for each of the control schedules;
- and
- providing the chosen control schedule to the robot to control operation of the robot.
Dependencies are inferred from the claim text.