Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control
AssigneeOnWafer Technologies, Inc.
InventorsMason L. Freed, Randall S. Mundt, Costas J. Spanos
Life of this patent
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Abstract
Data are collected for deriving response models and information required for developing and maintaining processes and process tools. Methods and apparatus for collecting the data include a sensor apparatus capable of collecting data with less perturbation and fewer disruptions than is usually possible using standard methods. The sensor apparatus is capable of being loaded into a process tool. From within the process tool, the sensor apparatus is capable of measuring data, processing data, storing data, and transmitting data. The sensor apparatus has capabilities for near real time data collection and communication.
Claims41
A method of deriving operating characteristics for a process tool used for processing workpieces, the method being performed using a sensor apparatus that includes an information processor, embedded executable commands for controlling the apparatus, and at least one sensor, the method comprising the steps of:
- a′) supporting the sensor and supporting the information processor on the substrate;
- a) loading the sensor apparatus into the process tool;
- b) measuring the operating characteristics with the sensor apparatus;
- c) converting the measured operating characteristics into digital data using the sensor apparatus;
- d) performing at least one step of:
- i. storing the digital data in the sensor apparatus, and
- ii. storing the digital data in the sensor apparatus and transmitting the digital data to a receiver.
The method of claim of 1 wherein the information processor comprises a microprocessor.
A method of deriving operating characteristics for a process tool used for processing workpieces, the method comprising the steps of:
- a) loading a sensor apparatus including at least one sensor, electronic devices for information processing and transmitting information, embedded executable commands for controlling the apparatus, and a substrate for supporting the at least one sensor and supporting the electronic devices into the process tool;
- b) measuring the operating characteristics with the sensor apparatus;
- c) converting the measured operating characteristics into digital data using the sensor apparatus;
- d) performing at least one step of:
- i. storing the digital data in the sensor apparatus,
- ii. transmitting the digital data to a receiver, and
- iii. storing the digital data in the sensor apparatus and transmitting the digital data to a receiver, and
- e) storing calibration data in the sensor apparatus for use in processing data from the sensors.
A method of deriving operating characteristics for a process tool used for processing workpieces, the method comprising the steps of:
- a′) providing a sensor apparatus having at least one sensor, electronic devices for information processing and transmitting information, and a substrate for supporting the at least one sensor and supporting the electronic devices;
- a) loading the sensor apparatus including the electronic devices into the process tool;
- b) measuring the operating characteristics with the sensor apparatus;
- c) converting the measured operating characteristics into digital data using the sensor apparatus;
- d) performing at least one step of:
- i. storing the digital data in the sensor apparatus,
- ii. transmitting the digital data to a receiver, and
- iii. storing the digital data in the sensor apparatus and transmitting the digital data to a receiver, and
- e) providing sufficient isolation of the sensor apparatus electronic devices to allow the electronic devices to operate in the presence of at least one of electric field, magnetic field, electromagnetic radiation, RF radiation, microwave radiation, temperatures greater than about 100 C., corrosive chemicals, and conditions detrimental to the functioning of the electronic components.
An apparatus for acquiring data for process tools used for processing workpieces, the apparatus comprising:
- a substrate;
- at least one sensor supported by the substrate, the sensor being capable of providing information;
- an information processor supported by the substrate, the information processor having embedded software for controlling the apparatus, the information processor being connected with the sensor so as to receive information from the sensor;
- an internal communicator supported by the substrate, the internal communicator being connected with the information processor so that the information processor can provide information to the internal communicator, the internal communicator being capable of transmitting information received from the information processor;
- a power source supported by the substrate, the power source being connected so as to provide power to at least one of:
- i. the information processor,
- ii. the internal communicator, and
- iii. the sensor;
- the information processor being capable of at least one of
- a) storing digital information, and
- b) storing digital information and transmitting digital information to the internal communicator.
An apparatus for acquiring data for process tools used for processing workpieces, the apparatus comprising:
- a substrate;
- at least one sensor supported by the substrate, the sensor being capable of providing information;
- an information processor supported by the substrate, the information processor being connected with the sensor so as to receive information from the sensor;
- an internal communicator supported by the substrate, the internal communicator being connected with the information processor so that the information processor can provide information to the internal communicator, the internal communicator being capable of transmitting information received from the information processor;
- a power source supported by the substrate, the power source being connected so as to provide power to at least one of:
- i. the information processor,
- ii. the internal communicator, and
- iii. the sensor;
- the information processor being capable of at least one of
- a) storing digital information, and
- b) storing digital information and transmitting digital information to the internal communicator;
- and
- wherein the power source is capable of being recharged wirelessly via magnetic induction.
An apparatus for acquiring data for process tools used for processing workpieces, the apparatus comprising:
- a substrate;
- at least one sensor supported by the substrate, the sensor being capable of providing information;
- an information processor supported by the substrate, the information processor being connected with the sensor so as to receive information from the sensor;
- an internal communicator supported by the substrate, the internal communicator being connected with the information processor so that the information processor can provide information to the internal communicator, the internal communicator being capable of transmitting information received from the information processor;
- a power source supported by the substrate, the power source being connected so as to provide power to at least one of:
- i. the information processor,
- ii. the internal communicator, and
- iii. the sensor;
- the information processor being capable of at least one of storing digital information, and
- storing digital information and transmitting digital information to the internal communicator;
- and
- a shield partially or substantially completely surrounding at least one of the information processor, the power source, and the internal communicator;
- the shield being capable of at least one of:
- i. allowing the electronic devices to operate under conditions detrimental to the functioning of the electronic devices, and
- ii. substantially preventing exposure of the process tool to contaminants from sensor apparatus.
A method of operating a sensor apparatus including at least one sensor, electronic devices for information processing and transmitting information, and a substrate for supporting the at least one sensor and supporting the electronic devices, and embedded software for the method, the method comprising the steps of:
- a) initializing the sensor apparatus;
- a′) causing the sensor apparatus to enter a sleep mode until at least one of
- i. a predetermined time,
- ii. a predetermined amount of time, and
- iii. receiving a command;
- and
- b) causing the sensor apparatus to do at least one step of
- i. collecting and processing data,
- ii. sending data to a receiver,
- iii. storing data, and
- iv. executing an operational command.
A method of operating a manufacturing facility for processing workpieces, the method comprising the steps of:
- a) providing at least one process tool capable of processing workpieces, wherein the process tool is part of the manufacturing facility;
- b) providing a sensor apparatus having embedded software for controlling the sensor apparatus, at least one sensor, electronic devices for information processing and transmitting information, and a substrate for supporting the at least one sensor and supporting the electronic devices, wherein the sensor apparatus is capable of collecting and wirelessly transmitting or storing data from within the process tool;
- c) measuring process data for the process tool using the sensor apparatus;
- d) performing at least one step of
- i. monitoring the performance of the process tool using data from the sensor apparatus, and
- ii. maintaining the performance of the process tool in response to the data from the sensor apparatus.
An apparatus for acquiring data for a process tool used for processing workpieces, the apparatus comprising:
- a substrate;
- at least one sensor supported by the substrate, the sensor being capable of providing information;
- an information processor supported by the substrate, the information processor having embedded software for controlling the apparatus, the information processor being connected with the sensor so as to receive information from the sensor;
- an internal communicator supported by the substrate, the internal communicator being connected with the information processor so that the information processor can provide information to the internal communicator, the internal communicator being capable of transmitting information received from the information processor;
- a power source supported by the substrate, the power source being connected so as to provide power to at least one of:
- i. the information processor,
- ii. the internal communicator, and
- iii. the sensor;
- the sensor apparatus being capable of storing digital information and transmitting digital information from within the process tool.
Dependencies are inferred from the claim text.