US 6,690,845 B1Granted

Three-dimensional opto-electronic modules with electrical and optical interconnections and methods for making

AssigneeFujitsu Limited

InventorsTetsuzo Yoshimura, Yashuhito Takahashi, Masaaki Inao, Michael G. Lee, William Chou, Solomon I. Beilin, Wen-chou Vincent Wang, James J. Roman, Thomas J. Massingill

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Abstract

Three-dimensional opto-electronic modules having a plurality of opto-electronic (O/E) layers, with optical signals being routed between O/E layers within one or more three-dimensional volumes, are disclosed. In preferred embodiments, the O/E layers are disposed over and above one another with at least one of their edges aligned to one another. At least two of the O/E layers have waveguides with ends near the aligned edges. A plurality of Zconnector arrays are disposed between the O/E layers and within the three-dimensional volumes to provide a plurality of Zdirection waveguides. A first vertical optical coupler couples light from one waveguide in one O/E layer to a Z-direction waveguide, and a second vertical optical coupler couples the light from the Z-direction waveguide to a second waveguide in a second O/E layer. In further preferred embodiments, segments of the Z-connector arrays are held by a holding unit.

Claims19

Dependent claims

An opto-electronic module comprising:

a holding unit having a central body and a plurality of sheet portions extending from said central body and separated from one another by a plurality of gaps;
a plurality of opto-electronic layers, each layer having one or more edges, at least one of said layers having one or more opto-electronic devices, and one or more optical waveguides, at least two of said layers each further comprising a waveguide which has an end near an edge of said layer, said layers being disposed over and above one another with at least one of their edges aligned to one another, the at least one aligned edge of each layer being inserted into a gap of the holding unit;
a plurality of Z-connector arrays, each array being disposed between two adjacent opto-electronic layers and having an arrangement of Z-connector segments, said Z-connector segments being held by said plurality of sheet portions of said holding unit, said plurality of Z-connector arrays being disposed such that the arrangement of Z-connector segments are aligned to one another to provide a plurality of Z-direction waveguides, at least one said Z-direction waveguide comprising a Z-connector segment from each of said Z-connector arrays;
a first vertical optical coupler disposed on a first one of said opto-electronic layers and coupling light between a waveguide of said first one of said opto-electronic layers and a first one of said Z-connector segments;
and
a second vertical optical coupler disposed on a second one of said opto-electronic layers and coupling light between a waveguide of said second one of said opto-electronic layers and a second one of said Z-connector segments.

3 more elements

An opto-electronic module comprising:

a plurality of opto-electronic layers, each layer having one or more edges, at least one of said layers having one or more opto-electronic devices, and one or more optical waveguides, at least two of said layers each further comprising a waveguide which has an end near an edge of said layer, said layers being disposed over and above one another with at least one of their edges aligned to one another;
a plurality of Z-connector arrays, each array being disposed between two adjacent opto-electronic layers and having an arrangement of Z-connector segments, said plurality of Z-connector arrays being disposed such that the arrangement of Z-connector segments are aligned to one another to provide a plurality of Z-direction waveguides, at least one said Z-direction waveguide comprising a Z-connector segment from each of said Z-connector arrays;
a first vertical optical coupler disposed on a first one of said opto-electronic layers and coupling light between a waveguide of said first one of said opto-electronic layers and a first one of said Z-connector segments, said first vertical optical coupler comprising a wavelength filter responsive to a first wavelength λ1;
and
a second vertical optical coupler disposed on a second one of said opto-electronic layers and coupling light between a waveguide of said second one of said opto-electronic layers and a second one of said Z-connector segments, said second vertical optical coupler comprising a wavelength filter responsive to a second wavelength λ2;
and
wherein said first and second vertical optical couplers couple light from Z-connector segments of the same Z-direction waveguide.

4 more elements

An opto-electronic module comprising:

a plurality of opto-electronic layers, each layer having one or more edges, at least one of said layers having one or more opto-electronic devices, and one or more optical waveguides, at least two of said layers each further comprising a waveguide which has an end near an edge of said layer, said layers being disposed over and above one another with at least one of their edges aligned to one another;
a plurality of Z-connector arrays, each array being disposed between two adjacent opto-electronic layers and having an arrangement of Z-connector segments, said plurality of Z-connector arrays being disposed such that the arrangement of Z-connector segments are aligned to one another to provide a plurality of Z-direction waveguides, at least one said Z-direction waveguide comprising a Z-connector segment from each of said Z-connector arrays;
a first vertical optical coupler disposed on a first one of said opto-electronic layers and coupling light between a waveguide of said first one of said opto-electronic layers and a first one of said Z-connector segments, said first vertical optical coupler comprising a wavelength filter responsive to a first wavelength λ2;
and
a second vertical optical coupler disposed on a second one of said opto-electronic layers and coupling light between a waveguide of said second one of said opto-electronic layers and a second one of said Z-connector segments, said second vertical optical coupler comprising a wavelength filter responsive to a second wavelength λ2;
and
wherein said first and second vertical optical couplers couple light to Z-connector segments of the same Z-direction waveguide.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application: 09/574,422Filed 19 May 2000 · continuation in part
Priority: 9 Oct 1998
Granted: 10 Feb 2004
Term ends: Not estimatedThe source records don’t support an estimate.

Classification32 codes

H10W 72/0198
Manufacture or treatment: batch processes
G02B 6/12002
Of the integrated circuit kind: three-dimensional structures
G02B 6/124
Basic optical elements, e.g. light-guiding paths: geodesic lenses or integrated gratings
G02B 6/132
Integrated optical circuits characterised by the manufacturing method: by deposition of thin films

Family

Application60/103,726Us provisional application · filed 9 Oct 1998
Application09/295,628Parent of this continuation-in-part · filed 20 Apr 1999
Application09/295,813Parent of this continuation-in-part · filed 20 Apr 1999
Application09/295,431Parent of this continuation-in-part · filed 20 Apr 1999
US 6,611,635 B1Parent of this continuation-in-part
US 6,343,171 B1Parent of this continuation-in-part
US 6,845,184 B1Related patent
US 6,690,845 B1This patent

From the US filing history. Foreign family members aren’t listed.