Integration method of dispatch and schedule tools for 300 mm full automation Fab
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMing Wang, Jim Chue, Ray Shih, Eric Chang, Jason Liu
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMing Wang, Jim Chue, Ray Shih, Eric Chang, Jason Liu
Estimating the term…
A method and system that creates a rule-based Operation Job Supervisor System (OJS) or decision engine to automate and control Fab production for the optimum movement of wafer boxes through the Fab. It is integrated with current manufacturing control systems and a cooperative model between the dispatching and scheduling functions. This easy-to-maintain system architecture makes use of a dynamic evaluation formula and sub-formula that can handle exception cases and consider wafer box physical position concurrently. Because the decision engine is rule based, rule can be revised without need for re-compiling and shutting down the system. New patterns are learned by the system automatically when variables and parameters in the formulas are revised.
An integrated method for automated Fab production decision support, comprising:
The integrated method for Fab automated production decision support of claim, 16 wherein information dynamically transported to said decision engine is a learning source.
An integrated system for automated Fab production decision support, comprising:
The integrated system for Fab automated production decision support of claim, 33 wherein information dynamically transported to said decision engine is a learning source.
Dependencies are inferred from the claim text.