Method and apparatus for determining a sampling plan based on defectivity

A method, comprising:

• processing a plurality of workpieces in accordance with one of a plurality of operating recipes, each operating recipe having an associated defectivity metric;
• and
• determining a sampling plan for measuring a characteristic of selected workpieces processed using a selected one of the operating recipes based on the associated defectivity metric.

A manufacturing system, comprising:

• a process tool configured to process a plurality of workpieces in accordance with an operating recipe;
• and
• a sampling controller configured to determine a defectivity metric based on the operating recipe and determine a sampling plan for measuring a characteristic of selected workpieces processed using the operating recipe based on the defectivity metric.

A system, comprising:

• a process tool configured to process a plurality of workpieces in accordance with one of a plurality of operating recipes, each operating recipe having an associated defectivity metric;
• and
• a sampling controller configured to determine a sampling plan for measuring a characteristic of selected workpieces processed using a selected one of the operating recipes based on the associated defectivity metric.