Micro-lens built-in vertical cavity surface emitting laser

Abstract

A micro-lens built-in vertical cavity surface emitting laser (VCSEL). The micro-lens built-in VSEL includes a VCSEL portion emitting a laser beam in a direction in which semiconductor material layers are stacked; a micro-lens formed of a material capable of transmitting the laser beam emitted from the VCSEL portion; and an adjusting portion located between the VCSEL portion and the micro-lens adjusting a distance between the micro-lens and the VCSEL portion. When constructing an optical system with the VCSEL including the VCSEL portion, the adjusting portion, and the micro-lens, there is no need for a separate condensing lens and focusing position adjusting element. In addition, optical alignment structure is simple with increased freedom in arranging elements, and the number of parts required is sharply reduced.

Dependencies are inferred from the claim text.