Surface emitting laser and photodiode, manufacturing method therefor, and optoelectric integrated circuit using the surface emitting laser and the photodiode

A optoelectric integrated circuit, comprising:

• an optical waveguide;
• a first mirror for incidence into the optical waveguide;
• a second mirror for emission from the optical waveguide;
• electric wiring;
• a surface emitting laser including:
• a semiconductor substrate;
• semiconductor stacked layers stacked on the substrate and divided into a light emitting portion and a reinforcing portion by a recessed portion, the reinforcing portion having an upper surface;
• a first insulating material buried in the recessed portion;
• and
• a pair of electrodes that apply a voltage to pass a current in a thickness direction of the light emitting portion, the pair of electrodes having an external connecting portion formed on the upper surface of the reinforcing portion;
• a laser driving circuit that drives the surface emitting laser;
• a photodiode including:
• a semiconductor substrate;
• semiconductor stacked layers divided into a light receiving portion and a reinforcing portion by a recessed portion, the reinforcing portion having an upper surface;
• a second insulating material buried in the recessed portion;
• and
• a pair of electrodes that detect a current flowing in a thickness direction of the light receiving portion due to incidence of light, the pair of electrodes having an external connecting portion formed on the upper surface of the reinforcing portion;
• and
• an amplifier circuit that detects signals from the photodiode, the surface emitting laser, the laser driving circuit, the photodiode, and the amplifier circuit being mounted on the electric wiring by flip chip bonding.