Control system for an electrostatically-driven microelectromechanical device
AssigneeNational Chiao Tung University
InventorsJin-Chern Chiou, Yu-Chen Lin
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Abstract
The present invention relates to a control system for an electrostatically-driven microelectromechanical device, which uses multiple electrodes to control the microelectromechanical device, i.e. the lower driven electrode of a capacitor with known two parallel driven electrodes is cut into a number of small electrodes. By selecting an electrode pattern for a desired electrostatic force, it is capable of altering the non-linearity of the device based on various applications and achieving a characteristic such as a linear driven, digital driven, or ultimately optimal driven manners, which is able to reach high operation accuracy for the existing circuit that only possesses a limited accuracy.
Claims10
A control system for an electrostatically-driven microelectromechanical device, comprising:
- a movable plate, actuated by an electrostatic force, for generating a rotation and a translating actions;
- multiple electrostatically-driving electrodes, for generating said electrostatic force by applying driving voltages;
- a switching matrix circuit, having electrical switching components, for switching said multiple electrostatic driving electrodes;
- and
- a controller, for determinating operation characteristics of said electrostatically-driven microelectromechanical device and selecting electrode patterns through said switching matrix circuit.
Dependencies are inferred from the claim text.