Method of creating reference data table
AssigneeNEC Electronics Corporation
InventorYutaka Akiyama
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AssigneeNEC Electronics Corporation
InventorYutaka Akiyama
Estimating the term…
A method of creating a reference table where polygon elements and rectangular pieces are connected with each other. The processor searches, as first searched rectangular pieces, the rectangular pieces that include the vertexes of the target polygon element, so as to register the element number of the target polygon element for the rows corresponding to the first searched rectangular pieces. Then the processor searches, as second searched rectangular pieces, the rectangular pieces that are traversed by the edges of the target polygon element, so as to register the element number of the target polygon element for the rows corresponding to the second searched rectangular pieces. The processor further registers the element number of the target polygon element for the rows corresponding to the rectangular pieces that exist within the target polygon element, so that the element number of the target polygon element is registered with all of the rectangular pieces overlapping the target polygon element. The processor repeatedly carries out the above-mentioned registration process for all of the polygon element, and thereby, the reference data table is obtained.
A method for creating a reference data table, comprising:
A computer program comprising software instructions which, when executed by a processor, causes the processor to perform predetermined operations for creating a reference data table, the predetermined operations including:
A method for creating a reference data table, comprising:
A computer program comprising software instructions which, when executed by a processor, causes the processor to perform predetermined operations for creating a reference data table, the predetermined operations including:
Dependencies are inferred from the claim text.
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Three-dimensional [3D] modelling for computer graphics: finite element generation, e.g. wire-frame surface description, tesselation
Design optimisation, verification or simulation: using finite element methods [FEM] or finite difference methods [FDM]
Image data processing or generation, in general
Computing and data processing
Term ended 24 Jul 2022 (estimated)
This invention relates to a method of creating a reference table helpful to high-speed computing, for example, in a fabrication process simulation of a semiconductor device.
In the field of the semiconductor device fabrication process simulation, an object is abstracted into a simulation model for the sake of simple computing. The simulation model is further divided into a plurality of elements, each of which is handled as a target of observation or prediction of the phenomenon occurring at the object.
Such a process simulation technique is disclosed in Japanese Unexamined Patent Publication (JP-A) No. 10-135145, which is incorporated herein by reference. In JP-A No. 10-135145, a simulation object is a two-dimensional object, and elements are triangle elements. In an ion-implantation simulation, the triangle element that an implanted ion reaches is computed.
FIG. 1 is a view for use in describing a relationship among an object, polygon elements, an orthogonal mesh comprising rectangular pieces, in accordance with a first embodiment of this invention;
FIG. 2 is an example view of a reference data table according to the first embodiment of this invention;
FIG. 3 is a flowchart of a main routine at a reference data table creation method according to the first embodiment of this invention;
Referring to FIG. 1, an object for a device process simulation is divided into a plurality of polygon elements, while a two-dimensional orthogonal mesh comprising a plurality of rectangular pieces is configured to cover the object. Each of the polygon elements is assigned with a unique number as an element number, while each of the rectangular pieces is assigned with a unique number as a piece number. In a first embodiment of the present invention, each of the illustrated polygon elements has a triangle shape, and each of pieces comprising the orthogonal mesh is square. The pieces are however referred to as rectangular pieces in the following description, that is the term “rectangular” means rectangular and square in this specification.
A method of creating reference data table according to the first embodiment of the present invention provides a reference data table as shown in FIG. 2. The illustrated reference data table is a generic type, but the present invention is not limited to the data structure of the illustrated table.
In the illustrated reference data table, rows correspond to the respective rectangular pieces comprising the orthogonal mesh. The left column stores the piece numbers of the respective rectangular pieces. In this embodiment, to store the piece numbers into the left column is also referred to as “registration of the rectangular pieces for the reference data table.” Each row also stores the polygon elements that partially or fully overlap the rectangular piece corresponding to the row. In this embodiment, to store the element numbers of the polygon elements into the right column is also referred to as “registration of the polygon elements for the reference data table”. In addition, the registration of the polygon element for the row corresponding to the rectangular piece is also called “registration of the polygon element for the rectangular piece”.