Microelectromechanical (MEMS) switching apparatus

A microelectromechanical (MEMS) switching apparatus comprising:

• a beam array comprising an anchor attached to a substrate and having a plurality of electrically conductive beams connected thereto and in electrical contact therewith, each of the plurality of beams comprising:
• a tapered portion having a proximal end and a distal end, the proximal end being attached to the anchor,
• an actuation portion attached to the distal end of the tapered portion, and
• a tip attached to the actuation portion, the tip having a contact dimple thereon;
• and
• an actuation electrode attached to the substrate and positioned between the substrate and the actuation portion of each beam.

A microelectromechanical (MEMS) switch apparatus comprising:

• a first anchor and a second anchor, both anchors being attached to a substrate;
• an electrically conductive beam attached to the first and second anchors and in electrical contact therewith, the beam comprising:
• a first tapered portion having proximal and distal ends, the proximal end being attached to the first anchor,
• a second tapered portion having proximal and distal ends, the proximal end being attached to the second anchor, and
• a suspended portion connected to the distal end of the first tapered portion and the distal end of the second tapered portion, the suspended portion comprising an actuation portion and a contact portion, each contact portion having a contact dimple thereon;
• and
• an actuation electrode attached to the substrate and positioned between the actuation portion and the substrate.

A microelectromechanical (MEMS) system comprising:

• a signal source;
• a signal destination connected to the signal source by a signal line;
• and
• a MEMS switch positioned in the signal line, the MEMS switch comprising:
• an anchor attached to a substrate;
• an electrically conductive beam attached to the anchor and in electrical contact therewith, the beam comprising:
• a tapered portion having a proximal end and a distal end, the proximal end being attached to the anchor,
• an actuation portion attached to the distal end of the tapered portion,
• a tip attached to the actuation portion, the tip having a contact dimple thereon;
• and
• an actuation electrode attached to the substrate and positioned between the actuation portion and the substrate.

A microelectromechanical (MEMS) system comprising:

• a signal source;
• a signal destination connected to the signal source by a signal line;
• and
• a MEMS switch positioned in the signal line, the MEMS switch comprising:
• a first anchor and a second anchor, both anchors being attached to a substrate;
• an electrically conductive beam attached to the first and second anchors and in electrical contact therewith, the beam comprising:
• a first tapered portion having proximal and distal ends, the proximal end being attached to the first anchor,
• a second tapered portion having proximal and distal ends, the proximal end being attached to the second anchor, and
• a suspended portion connected to the distal end of the first tapered portion and the distal end of the second tapered portion, the suspended portion comprising an actuation portion and a contact portion, each contact portion having a contact dimple thereon;
• and
• an actuation electrode attached to the substrate and positioned between the actuation portion and the substrate.