Time base comprising an integrated micromechanical ring resonator
AssigneeETA SA Fabriques d'Ebauches
InventorsMetin Giousouf, Heinz Kück, Rainer Platz
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AssigneeETA SA Fabriques d'Ebauches
InventorsMetin Giousouf, Heinz Kück, Rainer Platz
Estimating the term…
A time base having a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to this oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator (4) supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate. The ring resonator has a central post (5) extending from the substrate along the axis of rotation, and a free-standing oscillating structure (6) including an outer ring (60) coaxial with the axis of rotation, and a plurality of spring elements (62) disposed symmetrically around the central post and connecting the outer ring to the central post.
A time base comprising a resonator and an integrated electronic circuit for driving said resonator into oscillation and for producing, in response to said oscillation, a signal having a determined frequency, wherein said resonator is an integrated micromechanical ring resonator supported above a substrate and adapted to oscillate, according to a first oscillation mode, around an axis of rotation substantially perpendicular to said substrate, said ring resonator comprising:
An integrated micro-mechanical ring resonator for a time base, said ring resonator being supported above a substrate and adapted to oscillate around an axis of rotation substantially perpendicular to said substrate, said ring resonator comprising:
Dependencies are inferred from the claim text.